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中文摘要：
为了有效利用集束型晶圆制造设备,并使其满足动态到达晶圆调度要求,在描述调度问题域及引入时间约束集概念的基础上建立了调度问题的数学模型,根据模型提出了一种基于事件驱动的调度算法,调度目标是使到达晶圆在最短时间内完成加工.对调度算法进行了仿真实验分析.结果表明,该算法有效且实用.
英文摘要：
On the basis of statement domain of scheduling problems, an events-driven-based scheduling algorithm was presented with an objective of minimizing the processing time of current wafer to use cluster tools effectively and satisfy the scheduling of real-time coming wafers. Mathematical formulations of the scheduling problems using temporal constraint sets were presented. A scheduling algorithm was developed. Finally, simulation experiments were designed to evaluate the proposed algorithm. The results indicate that the proposed algorithm is available and effective.
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A proactive approach for simultaneous berth and quay crane scheduling problem with stochastic arriva
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