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中文摘要：
由于半导体晶圆制造过程的复杂性,使得实时控制过程难于实施.针对光刻区的不同状态,提出一种基于Kohonen神经网络的多策略实时调度方法,以适应生产过程中的复杂变化.仿真结果表明,该调度方法是有效可行的.
英文摘要：
Semiconductor enterprises should continue to provide more capacity to meet the demand of the highly competitive semiconductor market. The complicacy of semiconductor manufacturing process makes it hard to implement real-time scheduling. To some extend, photolithography area controls the performance of whole semiconductor fabrication. A multi-strategy real-time scheduling method based on Kohonen network was proposed to accommodate the complex change of state in photolithography area. The result of simulation of a semiconductor manufacturing system improves that the proposed method is effective and feasible.
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