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Structure and property of magnetron sputtered ternary cobalt-nickel suicide films
  • ISSN号：0167-9317
  • 期刊名称：Microelectronic Engineering
  • 时间：2010.10.10
  • 页码：1828-1833
  • 相关项目：低成本和高效率的多晶硅薄膜太阳能电池的研究
作者： Xia, Zhou|Huang, Shihua|
同期刊论文项目
低成本和高效率的多晶硅薄膜太阳能电池的研究
期刊论文 37 会议论文 6 专利 1
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