位置：成果数据库 > 期刊 > 期刊详情页
脉冲激光沉积法Li-N双受主共掺p型ZnO薄膜的生长及其特性
  • ISSN号：1674-4926
  • 期刊名称：《半导体学报：英文版》
  • 时间：0
  • 分类：TN304.2+1[电子电信—物理电子学]
  • 作者机构：[1]浙江大学硅材料国家重点实验室,杭州,310027 浙江大学硅材料国家重点实验室,杭州,310027 浙江大学硅材料国家重点实验室,杭州,310027 浙江大学硅材料国家重点实验室,杭州,310027 浙江大学硅材料国家重点实验室,杭州,310027 浙江大学硅材料国家重点实验室,杭州,310027
  • 相关基金：国家自然科学基金资助项目(批准号:50532060,50572095)
作者： 张银珠[1], 叶志镇[1], 吕建国[1], 何海平[1], 顾修全[1], 赵炳辉[1]
关键词： Li-N双受主共掺杂, p-ZnO, 脉冲激光沉积
中文摘要：

采用脉冲激光沉积技术制备了Li-N双受主共掺杂p型ZnO薄膜,其中Li来自Li掺杂ZnO陶瓷靶,N来自N2O生长气氛.室温Hall测试发现Li-N共掺p型ZnO薄膜的最低电阻率为3.99Ω·cm,迁移率为0.17cm2/(V·s),空穴浓度为9.12×1018cm-3.PL谱测试发现了与Li受主和N受主态相关的发光峰,其受主能级分别约为120和222meV.由p-ZnO:(Li,N)薄膜制备的ZnO同质p-n结具有整流特性.

同期刊论文项目
氧化锌场发射器件的纳米线的设计、可控生长与应用研究
期刊论文 36 会议论文 2
稳定优质的p型ZnO可控生长与同质ZnO-LED电致发光
期刊论文 56
同项目期刊论文
ZnO nanorods with different morphologies and their field emission properties.
Synthesis and characterization of dendritic ZnMgO nanostructure,
Temperature-dependent photoluminescence and photoluminescence excitation of aluminum monodoped and a
ZnO light-emitting diode grown by plasma-assisted metal organic chemical vapor deposition
Synthesis of ZnO/cubic (Zn MgO) heterostructure nanorods
Synthesis of vertically aligned Al-doped ZnO nanorods array with controllable concentration
Microcosmic growth process of ZnO microrods
Synthesis of radial ZnO nanostructures by a simple thermal evaporation method
Rational synthesis and tunable optical properties of quasialigned Zn1-x Mgx O nanorods (vol 91, artn
Identification of acceptor states in Li-doped p-type ZnO thin films
Preparation and characterization of Al-doped quasi-aligned ZnO submicro-rods
Density controllable growth of ZnO quantum dots by MOCVD
Quasi-aligned Zn1?xMgxO nanorods synthesized by thermal evaporation
Rapid synthesis of novel flowerlike ZnO structures by thermolysis of zinc acete
Control of p- and n-type conductivities in Li-doped ZnO thin films
Temperature-dependent photoluminescence of quasi-aligned Al-doped ZnO nanorods
Catalyst-free synthesis of vertically aligned screw-shape InZnO nanorods array
Photoluminescence properties of ZnO nanoneedles grown by metal organic chemical deposition
Rational synthesis and characterization of heterostructures of ZnO nanocombs with (Zn,Cd)O nanocaps
ZnMgO nanorod arrays grown by metal-organic chemical vapor deposition
ZnO nanowires grown along the non-polar direction
Negative thermal quenching behavior and long luminescence lifetime of surface-state related green em
p-Type behavior in nominally undoped znO thin films by oxygen plasma growth
Dopant source choice for formation of p-type ZnO:LI accetor
Photoluminescence properties of ZnO nanoneedles grown by metal organic chemical vapor deposition
Catalyst-free MOCVD growth of aligned ZnO nanotip arrays on silicon substrate with controlled tip sh
Growth and properties of ZnO/hexagonal ZnMgO/cubic ZnMgO nanopagoda heterostructures,
Controllable growth of nano-structureed zinc oxide: from zero to threee dimension
GaN纳米棒的制备及机理研究
Li-N-H共掺法制备p型ZnO薄膜
氧化锌微米棒的微观生长过程
控制O2流量生长结状ZnO微纳米棒及其特性研究
Properties of N-doped ZnO thin films in annealing process
Effects of RF power variation on properties of N-doped p-type ZnO thin films grown by plasma-assiste
Microstructure and defect investigations of the as-grown and annealed ZnO/Si thin films
Microstructure study of ZnO thin films on Si substrate grown by MOCVD
Fabrication of p-type ZnMgO films via pulsed laser deposition method by using Li as dopant source
Improved p-type conductivity and acceptor states in N-doped ZnO thin films
Fabrication of Sb-doped p-type ZnO thin films by pulsed laser deposition
Preparation and characterization of bat-like ZnO micro- and nanorods by adjusting oxygen flux
Low-temperature growth of p-type ZnO thin films via plasma-assisted MOCVD
Al-N共掺p型Zn_(0.95)Mg_(0.05)O薄膜的性能
Effect of oxygen pressure on structural and electrical properties of pulsed laser deposition-derived
Al、N共掺Zn_(1-x)Mg_xO薄膜的制备与性能研究
Fabrication of p-type Li-doped ZnO films by pulsed laser deposition
Synthesis and characterization of dendritic ZnMgO nanostructures
p-Type conduction in phosphorus-doped ZnO thin films by MOCVD and thermal activation of the dopant
MOCVD法制备磷掺杂p型ZnO薄膜
ZnO薄膜的缺陷研究进展
Rapid synthesis of novel flowerlike ZnO structures by thermolysis of zinc acetate
Defect-related vibrational and photoluminescence spectroscopy of a codoped ZnO : Al : N film
Preparation of Li-N-H codoped p-type ZnO films
脉冲激光沉积法(PLD)生长Co掺杂ZnO薄膜及其磁学性能
Comparative photoluminescence study on p-type and n-type ZnO films codoped by nitrogen and aluminium
Fabrication of ZnO/Al2O3 core-shell nanostructures and crystalline Al2O3 nanotube
Synthesis of vertically aligned Al-doped ZnO nanorods array with controllable Al concentration
Highly transparent and conductive Zn0.85Mg0.15O : Al thin films prepared by pulsed laser deposition
Highly near-infrared reflecting and transparent conducting ZnO : Ga films: substrate temperature eff
Highly infrared reflective Behavior of transparent conductive ZnO : Ga films synthesized by DC react
Effects of Mg doping on the properties of highly transparent conductive and near infrared reflective
在不同衬底温度下用直流反应磁控溅射法制备p型ZnO薄膜(英文)
Co掺杂ZnO薄膜的结构和磁学性能(英文)
Fabrication and post-anneal activation of p-type ZnMgO : Li film using dc reactive magnetron sputter
Fine structure on the excitonic emission in AgI nanoparticles embedded in silica glass
Growth and properties of ZnO/hexagonal ZnMgO/cubic ZnMgO nanopagoda heterostructures
Synthesis of two kinds of ZnO nanostructures by vapor phase method
控制O_2流量生长结状ZnO微纳米棒及其特性研究
Li-N-H共掺法制备p型ZnO薄膜
衬底类型对于Ga-N共掺杂ZnMgO薄膜性能的影响
生长参数对MOCVD法制备的p型ZnO薄膜性能的影响
在不同衬底温度下用直流反应磁控溅射法制备p型ZnO薄膜
射频反应磁控溅射法退火生长Na-N共掺杂p-ZnO薄膜
PLD法制备锑掺杂p型ZnO薄膜
Al、N共掺Zn1-xMgxO薄膜的制备与性能研究
控制O2流量生长结状ZnO微纳米棒及其特性研究
Na掺杂p型ZnO和ZnO/ZnMgO多量子阱结构基LED的制备与室温电注入发射紫蓝光
Room-temperature electroluminescence of p-ZnxMg（1-x）O：Na/n-ZnO p-n junction light emitting diode
PLD法合成MgxZn1-xO纳米柱阵列
Al-N共掺p型Zn_0.95Mg_0.05O薄膜的性能
期刊信息
  • 《半导体学报：英文版》
  • 中国科技核心期刊
  • 主管单位:中国科学院
  • 主办单位:中国电子学会 中国科学院半导体研究所
  • 主编：李树深
  • 地址：北京912信箱
  • 邮编：100083
  • 邮箱：cjs@semi.ac.cn
  • 电话：010-82304277
  • 国际标准刊号：ISSN：1674-4926
  • 国内统一刊号：ISSN：11-5781/TN
  • 邮发代号:2-184
  • 获奖情况:
  • 90年获中科院优秀期刊二等奖,92年获国家科委、中共中央宣传部和国家新闻出版署...,97年国家科委、中共中央中宣传部和国家新出版署三等奖,中国期刊方阵“双效”期刊
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,美国化学文摘（网络版）,荷兰文摘与引文数据库,美国工程索引,美国剑桥科学文摘,英国科学文摘数据库,日本日本科学技术振兴机构数据库,中国中国科技核心期刊,中国北大核心期刊（2004版）,中国北大核心期刊（2008版）,英国英国皇家化学学会文摘,中国北大核心期刊（2000版）
  • 被引量:7754