中文摘要：

利用直接模拟蒙特卡洛方法（DSMC），模拟了气体凝聚团簇源在不同的腔长，不同的腔壁温度和不同惰性气体的含量的条件下，Cu团簇的尺寸分布．模拟结果表明：腔的长度越长，产生大团簇的比例越大；腔壁的温度越低，产生的大团簇的比例越大；惰性气体的含量比例越高，产生的大团簇的比例越小；相同的惰性气体含量下，He／Ar比值越高，产生大团簇的比例越大．

英文摘要：

In a gas aggregation cluster source, the size distributions of the Cu clusters in various experimental conditions such as growth length, out wall temperature and concentration of the inert gas are studied by direct simulation Monte Carlo method. The results show that the of cluster increases with the increase in the growth length, the size increases with the decrease in temperature and the number of big clusters decreases on increasing the concentration of the inert gas. Large clusters can be obtained after addition of He to the Ar in the same concentration of the inert gas.