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Testing of defects in Si semiconductor apparatus by using single-photon detection
  • ISSN号：0168-583X
  • 期刊名称：Nuclear Instruments and Methods in Physics Researc
  • 时间：2013
  • 页码：210-213
  • 相关项目：基于单光子探测的微波集成电路的缺陷检测
作者： Pan Zhongliang, Chen Ling, Chen Guangju|
同期刊论文项目
基于单光子探测的微波集成电路的缺陷检测
期刊论文 42 会议论文 2
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