Preparation of TiN Films on AZ91C by Cathode Multi Arc Ion and Its Performance
ISSN号:1001-4373
期刊名称:《兰州交通大学学报》
时间:0
分类:TG135.6[金属学及工艺—合金;一般工业技术—材料科学与工程;金属学及工艺—金属学]
作者机构:[1]Key Laboratory of Opto-Electronic Technology and Intelligence Control, Ministry of Education, Lanzhou Jiaotong University, Lanzhou 730070, China, [2]State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
相关基金:Acknowledgement This work was supported by the National Science Support Program (2006BAE04B05-3), MOE Program for Changjiang Scholars and Innovative Research Team (grant No. 0629),National Science Founda- tion of China (grant No. 50505037),863 Hi-Tech Program (grant No. 2006AA04Z322 and "Qing Lan"Talent Engineering Funds by Lanzhou Jiaotong University).