Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance
ISSN号:1001-4373
期刊名称:《兰州交通大学学报》
时间:0
分类:O614.411[理学—无机化学;理学—化学]
作者机构:[1]Lanzhou Dachen Automatic Control System Co. , Ltd, Lanzhou 730070, China, [2]key Laboratory of Opto-Electronic Technology and Intelligence Control,Ministry of Education, Lanzhou Jiaotong University, Lanzhou 730070,China, [3]State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University, Xi'an 710049, China
相关基金:Acknowledgement This work was supported by the National Science Support Program (2006BAE04B05-3), MOE IRT (grant No. 06029), National Science Foundation of China (grant No. 50505037), 863 Hi-Tech Program (grant No. 2006AA04Z322 and "Qing Lan" Talent Engineering Funds by Lanzhou Jiaotong University).