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下一代光刻技术—压印光刻
  • 期刊名称：EI收录 机械工程学报 43(3):1-7
  • 时间：0
  • 相关项目：聚合物太阳能电池p-n异质结界面的三维微结构压印成形
同期刊论文项目
聚合物太阳能电池p-n异质结界面的三维微结构压印成形
期刊论文 34 会议论文 3
同项目期刊论文
退火气氛对铝诱导a-Si薄膜结晶过程的影响
Investigation of ink transfer in roller-reversal imprint process
A novel loading and demoulding process control in UV nanoimprint lithography
Alignment measurement method for imprint lithography using moiré fringe pattern
压印光刻忠模具空间位姿的识别及仿真
释放保型软压印光刻工艺
Development of a step micro-imprint lithography tool
A novel overlay process for imprint lithography using load release and alignment error pre—compensat
Two-Step curing method for demoulding in UV nanoimprint lithography
纳米压印光刻中的多步定位研究
压印光刻对准中阻蚀胶层的设计及优化
紫外压印中阻蚀胶残膜刻蚀工艺
高精度压印机热误差补偿中温度变量的辨识
基于纳米压印技术的光伏器件微三维构型研究
紫外光固化中阻蚀胶薄膜应力分析及成膜控制
步进闪光压印光刻模具制作工艺研究
Fabrication of carbon nanotube arrays for field emission and sensor devices
Distortion reduction by Load Release for Imprint Lithography
Roller-reversal imprint for preparation of large area microstructures
Review of the wafer stage for nanoimprint lithography
不同形貌衬底上铝诱导poly—Si薄膜的制备及表征
Preparation of TiN Films on AZ91C by Cathode Multi Arc Ion and Its Performance
Study of Carbon Nano-Tube Photo-electronic Devices by Nano-Imprint Lithography
Soft Imprint Lithography for Pixel Array Manufacturing in OLED
基于光刻版的无留膜紫外纳米压印技术研究
Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance
叶绿体长延时（τ〉5s）荧光成分产生机理的实验验证
植物光诱导延迟发光介导的酸性环境污染监测
基于分步式压印光刻的激光干涉仪纳米级测量及误差研究
镁合金表面Ti—TiN复合镀层的阴极多弧离子制备与表征
下一代光刻技术——压印光刻
AZ91C镁合金表面Ti-TiN复合镀层的阴极多弧离子镀法制备与表征
红外光谱法测定农药中吡虫啉含量