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A novel loading and demoulding process control in UV nanoimprint lithography
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聚合物太阳能电池p-n异质结界面的三维微结构压印成形
期刊论文 34 会议论文 3
同项目期刊论文
退火气氛对铝诱导a-Si薄膜结晶过程的影响
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纳米压印光刻中的多步定位研究
压印光刻对准中阻蚀胶层的设计及优化
紫外压印中阻蚀胶残膜刻蚀工艺
高精度压印机热误差补偿中温度变量的辨识
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步进闪光压印光刻模具制作工艺研究
Fabrication of carbon nanotube arrays for field emission and sensor devices
Distortion reduction by Load Release for Imprint Lithography
Roller-reversal imprint for preparation of large area microstructures
Review of the wafer stage for nanoimprint lithography
不同形貌衬底上铝诱导poly—Si薄膜的制备及表征
Preparation of TiN Films on AZ91C by Cathode Multi Arc Ion and Its Performance
Study of Carbon Nano-Tube Photo-electronic Devices by Nano-Imprint Lithography
Soft Imprint Lithography for Pixel Array Manufacturing in OLED
基于光刻版的无留膜紫外纳米压印技术研究
Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance
叶绿体长延时（τ〉5s）荧光成分产生机理的实验验证
植物光诱导延迟发光介导的酸性环境污染监测
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镁合金表面Ti—TiN复合镀层的阴极多弧离子制备与表征
下一代光刻技术——压印光刻
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