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基于聚焦离子束铣削技术的微刀具制备
  • ISSN号：0493-2137
  • 期刊名称：天津大学学报
  • 时间：2010.5.5
  • 页码：469-472
  • 分类：TN305.92[电子电信—物理电子学] TH161.1[机械工程—机械制造及自动化]
  • 作者机构：[1]天津大学精密测量技术与仪器国家重点实验室,天津市微纳制造技术工程中心,天津300072
  • 相关基金：国家自然科学基金重点资助项目（50935001） 国家自然科学基金资助项目（50905126）; 国家高技术研究发展计划（863计划）资助项目（2009AA044204 2009AA044305）; 高等学校学科创新引智计划资助项目（B07014）; 博士后科学基金资助项目（20080440099）
  • 相关项目：微细切削刀具设计理论与微铣钻刀具制造技术基础
作者： 张少婧|徐宗伟|房丰洲|胡小唐|
关键词： 聚焦离子束, 微刀具, 微加工, 超精密加工, focused ion beam, micro tool, micro fabrication, ultra-precision machining
中文摘要：

提出了一种利用聚焦离子束（FIB）技术的铣削功能制备微细切削刀具的方法,通过设置恰当的离子束参数及精确控制刀具的不同刀面相对离子束的位置,可以获得具有高精度特征尺寸、锋锐刃口且复杂形状的微刀具.被加工刀具的典型特征尺寸为5～50,μm,可加工各种不同截面形状的微刀具.对硬质合金材料的毛坯进行FIB铣削,获得了宽度为7.65,μm、刃口半径小于30,nm的矩形微刀具.通过在超精密车床上进行加工试验,结果表明,FIB铣削的微刀具具有很好的加工性能.

英文摘要：

A method for fabricating micro cutting tools using focused ion beam（FIB）milling technique has been proposed.Micro tools with high precision feature sizes,sharp cutting edges and complicated shapes can be achieved by setting proper ion beam parameters and controlling the precise position of tool facets relative to focused ion beam.The fabricated micro tools have typical feature sizes ranging from 5～50,μm and various cross-sectional shapes.A micro tool with rectangular cross-section,width of 7.65 μm and curvature radius of cutting edge less than 30 nm has been obtained with FIB milling of a hard alloy tool blank.The results of ultra-precision machining experiments show that the micro tool fabricated with FIB milling technique has excellent processing performances.

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期刊信息
  • 《天津大学学报：自然科学与工程技术版》
  • 北大核心期刊（2011版）
  • 主管单位:
  • 主办单位:天津大学
  • 主编：单平
  • 地址：天津市南开区
  • 邮编：300072
  • 邮箱：
  • 电话：022-27403448
  • 国际标准刊号：ISSN：0493-2137
  • 国内统一刊号：ISSN：12-1127/N
  • 邮发代号:6-27
  • 获奖情况:
  • 中国期刊方阵双效期刊
  • 国内外数据库收录:
  • 美国数学评论（网络版）,美国剑桥科学文摘,中国中国科技核心期刊,中国北大核心期刊（2008版）,中国北大核心期刊（2011版）,中国北大核心期刊（2014版）
  • 被引量:6410