中文摘要：

采用感应耦合等离子体刻蚀工艺制备了微型硅模具,基于硅模具研究了非晶合金Zr41.25Ti13.75Ni10Cu12.5Be22.5的超塑性微零件成形工艺.采用差示扫描量热仪测定了Zr41.25Ti13.75Ni10Cu12.5Be22.5的过冷液相区间为360～440℃,在过冷液相区间热压成形非晶合金微零件、机械研磨去除零件飞边和采用40%的KOH溶液腐蚀去除硅模具,得到非晶合金微型零件.自主研制了成形设备,仿真分析与实验相结合,解决了成形过程中设备的温度控制问题,比较分析了不同温度下的成形结果,实验与仿真结果符合较好.在410℃条件下成功制备出模数0.03、齿数66和厚度500μm的微型内齿轮,齿形轮廓清晰,X射线衍射仪扫描结果显示该微齿轮为非晶结构,从而验证了采用该工艺制备微型零件的可行性.

英文摘要：

Super-plastic micro-forming process of bulk metallic glasses Zr41.25Ti13.75Ni10Cu12.5Be22.5 utilizing micro silicon molds was investigated,where the micro silicon molds were fabricated by inductively coupled plasma etching.The super-cooled liquid region,360～440 ℃,was measured by differential scanning calorimeter.Micro components were thermoformed in the super-cooled liquid region.The flash of micro components was removed by mechanical grinding,and the silicon molds were resolved with 40% KOH.Forming equipment was developed on the basis of the super-plastic process,and the temperature-control was solved by simulation analysis and experiments.Subsequently,the forming results in different temperatures were analyzed,which confirmed the simulation results.Finally,an internal gear with 0.03 module,66 teeth and 500 μm thickness was obtained with good dimensional accuracy at 410 ℃.The gear had a relatively good profile with an amorphous structure proved by X-ray diffraction scanning,which substantiated the feasibility of the process.