中文摘要：

采用溶胶-凝胶技术制备不同Na掺杂ZnO薄膜,用XRD、拉曼光谱仪、AFM、SEM和紫外可见分光光度计等表征方法研究了Na掺杂量对ZnO薄膜的表面形貌和光学性质的影响。XRD和Raman光谱分析表明：8.0 at%Na掺杂ZnO薄膜具有最佳c轴择优取向,内部残余张应力最大;表面形貌研究结果显示：薄膜的平均粒径和粗糙度均随Na含量的增加而增大。薄膜在可见光范围内的平均透射率大于80%,随着Na含量从0增加到10at%,薄膜的光学带宽由3.283 eV增大到3.305 eV。

英文摘要：

ZnO thin films with different Na doping content were prepared by sol-gel method.The effects of Na doping content on morphology and optical properties of ZnO thin films were investigated by XRD,Raman spectrometer,AFM,SEM,and UV-vis spectrophotometer,respectively.XRD and Raman spectra analysis indicate that the 8.0 at% Na-doped ZnO thin film has the optimal preferential c-axis orientation and the maximum residual tensile stress.AFM and SEM images show that mean particles diameter and roughness of the thin films increased as the Na doping content increasing.The average optical transparency of the thin films was higher than 80% in the visible range.Optical band gap of the thin films increases from 3.283 eV to 3.305 eV as the Na doping content increased from 0 to 10at%.