以热氧化硅片为衬底,以溶液溶解和真空蒸镀两种方法,在不同温度下制备有机半导体材料并五苯(pentacene)薄膜。用原子力显微镜(AFM)分析了薄膜的形貌,讨论了影响薄膜质量的各种因素。
The thin films of organic semiconductor pentacene were fabricated by tow ways on SiO2 layer by dry oxidation, which were solution process and thermal evaporation. Using the atomic force microscopic images analyzed the surface morphologies and discussed influences of fabricate the pentacene thin-films.