以X射线衍射仪(XRD)研究了在硅表面形成并五苯多晶薄膜晶体结构,通过原子力显微镜(AFM)分析了在二氧化硅表面形成并五苯多晶薄膜的形貌。以热氧化的硅片作为绝缘栅极,并五苯作为有缘层,采用底接触结构,研制场效应晶体管。经过测试得到其场效应迁移率为1.23cm^2/Vs,开关电流比>10^6。
Using the atomic force microscopic images analyzed the surface morphologies and X-ray diffraction (XRD) patterns analyzed the crystal structure of the samples. Thermally grown silicon dioxide was used as the gate dielectric, pentacene as the semiconductor layer. We fabricated the field effect transistor with bottom-contact configuration. The highest mobility of the device is 1.23 cm^2/Vs, the on/off ratio is about 10^6.