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中文摘要：
用溶胶-凝胶法采用快速退火方法在Pt／Ti／SiO2／Si衬底上制备了BiFeO3（BFO）薄膜。通过淬火冷却与自然冷却的对比，研究了淬火冷却对BiFeO3（BFO）薄膜的结构、形貌及电性能的影响。XRD研究表明淬火未对薄膜的结晶产生显著的影响。扫描电镜研究表明淬火导致薄膜表面粗糙度增加并出现了裂纹。铁电性测试表明淬火冷却得到的薄膜，其铁电性得到了增强，同时，淬火使BiFeO3薄膜的漏电流增加。
英文摘要：
BiFeO3 （BFO） films are deposited on Pt / Ti/SiO2 / Si substrates by the sol-gel method incorporated with rapid annealing process. The effects of quenching and cooling in furnace on the structure, morphology and electric property of BiFeO3 films are studied. XRD results showed that there is no substantial effect to the crystallization of BFO films by quenching. Cracks and larger smoothness are observed on the surface of the quenched film through SEM study. The enhanced ferroelectricity is identified in the quenched film by measuring the electric hysteresis loops. Moreover,the leakage current increases in the quenched film compared with the furnace cooled film.
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