中文摘要：

采用二次阳极氧化铝的方法制备出厚度仅为509nm超薄多孔阳极氧化铝模版，氧化铝模版上孔洞大小均匀，呈完美的六角分布，孔径为35nm左右，孔间距约为100nm。成功地将多孔阳极氧化铝模版转移到硅衬底上，并在磷酸溶液中通孔，使薄膜上小孔双向贯通。可以十分方便的利用该模版合成纳米点、纳米柱等纳米结构。

英文摘要：

Ultra-thin porous anodic alumina templates have a broad prospect in different synthetic nano-structure system. We have prepared ultra-thin porous anodic alumina films by the method of two-step anodizing. The thickness of the film is only 509 nm, holes show perfect hexagonal distribution with uniform size and regular shape, whose diameters are around 35 nm and space betweens are about 100 nm. Porous anodic alumina films were successfully transplanted onto silicon substrate and two-way through holes were produced in phosphoric acid. The template can be very convenient to use to form nano-structures, such as nano-dots and nano-poles.