中文摘要：

精确分析磁控靶的磁场对优化磁控靶的设计非常重要。本文采用有限元法分析了圆形平面磁控靶的二维磁场分布，理论计算的结果与特斯拉计的实验测量相符，通过对比两种不同磁极尺寸的磁控靶的磁场，发现减少磁极的尺寸可以扩展靶表面径向磁场区域，磁芯上方加圆锥形极靴可以增强磁芯上方径向磁场。

英文摘要：

2-Dimensional magnetic field distribution of the planar magnetron target was numerically calculated in fi- nite element method. The results show that the calculation agrees well with the experimental measurements and that target geometry considerably affects themagnetic distribution. For example, size reduction of the magnet extends the magnetic area in radial direction on the target surface; and addition of a cone-shaped pole-shoe above the inner magnet increases the radial components of the magnetic flux.