Investigations on the gate oxide dependence of AC RTN characteristics in nanoscaled MOSFETs: SiON vs
- 所属机构名称:北京大学
- 会议名称:2013 International Symposium on VLSI Technology, Systems and Application, VLSI-TSA 2013
- 时间:2013
- 成果类型:会议
- 相关项目:新型围栅硅纳米线MOS器件的涨落性与可靠性研究