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Two-dimensional Self-limiting Oxidation for Non-planar Silicon Nano-devices from Top-down Approach:
  • 所属机构名称：北京大学
  • 会议名称：2012 China Semiconductor Technology International Conference (CSTIC)
  • 时间：2012.3.18
  • 成果类型：会议
  • 相关项目：新型围栅硅纳米线MOS器件的涨落性与可靠性研究
作者： Jiewen Fan|Qiumin Xu|Zizhen Jiang|Yujie Ai|Runsheng Wang|Ru Huang|
同会议论文项目
新型围栅硅纳米线MOS器件的涨落性与可靠性研究
期刊论文 8 会议论文 20
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