Experimental Study on the Variation of NBTI Degradation in Nano-scaled High-k/Metal-gate PFETs
- 所属机构名称:北京大学
- 会议名称:2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT)
- 时间:2012.10.29
- 成果类型:会议
- 相关项目:新型围栅硅纳米线MOS器件的涨落性与可靠性研究