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中文摘要：
采用蒙特卡罗（Monte Carlo）模拟方法,研究了初始烧蚀粒子总数对其传输中的密度和速度及环境气体密度分布的影响。结果表明,随着烧蚀粒子总数增加,烧蚀粒子高密度峰离开靶的最大距离增大,到距靶最大距离处所用时间,出现先增大后减小的变化,烧蚀Si粒子的速度分布随粒子总数增多而变宽,当粒子总数为1.01×10^15和1.01×10^16时,出现速度劈裂现象。
英文摘要：
The influence of the total number of Si particles on the spatial density distribution of the particles（Si and He） and the velocity distribution of the Si-particles is investigated with Monte Carlo simulation.The results indicate that the maximum distance of high density peak from the target and the width of velocity distribution increase,and the time of reaching the maximum distance from the target firstly increases and then decreases with the increase of number of Si-particles.The splitting of the velocity is observed at the vicinity of 1.01×10~（15） and 1.01×10~（16） Siparticles.
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