采用有限差分法,并结合相应的边界条件,求解热传导方程,对纳秒脉冲激光烧蚀硅(Si)靶的动力学过程进行了数值模拟,利用热力学参量的跳跃条件,得到离开Knudsen层的烧蚀粒子流速、粒子总数和数密度等初始参数,并给出了烧蚀粒子的最大膨胀速度。同时讨论了激光波长、能量密度、脉宽等参量对烧蚀粒子初始参数的影响。结果表明:短的激光波长、高能量密度、窄的脉宽,可以产生大的初始流速、粒子总数和数密度。
Based on finite difference, the dynamics of nanosecond pulsed laser ablation of silicon target was investigated by the heat flow equation and the corresponding boundary conditions. The initial flow velocity, total number and vapor density of ablated particles just outside the Knudsen layer were gained by the jump conditions of the thermodynamics. The influence of the wavelength, energy density, pulse width and other parameters of the laser on the initial particle ablation parameter were studied. The results showed that a large initial flow velocity, the total number of the particles and a high vapor density were generated by a short laser wavelength, the large energy density and the narrow pulse width.