采用磁控溅射法制备SrRuO3(SRO)薄膜、脉冲激光沉积法制备BiFeO3(BFO),构架了Pt/SRO/BFO/SRO/SrTiO3(001)异质结,采用X射线衍射仪(XRD)、铁电测试仪研究了沉积温度对BFO薄膜结构和性能的影响。研究结果表明,随着温度的升高,BFO(001)和(002)衍射峰强度逐渐增强,BFO(110)和Bi2O3衍射峰强度逐渐减小,不同沉积温度下生长的样品都具有铁电性,在800 kV/cm的电场下,640℃下生长的BFO薄膜的剩余极化强度为65μC/cm2。采用数学拟合的方法研究了Pt/SrRuO3/BiFeO3/SrRuO3/SrTiO3的漏电机理,结果表明BFO薄膜导电机理为普尔-弗兰克导电机理。
Pt/SrRuO3(SRO)/BiFeO3(BFO)/SRO/SrTiO3 heterostructure had been fabricated on SrTiO3(001) substrate,in which SRO and BFO thin films were deposited by RF magnetron sputtering and pulsed laser deposition,respectively.The effect of deposition temperature on the structural and properties of BFO thin film were investigated by X-ray diffraction(XRD) and a ferroelectric tester.It is found that as deposition temperature increasing,the intensities of BFO(001) and(002) peaks increase gradually,while BFO(110) and Bi2O3 peaks decrease.BFO films deposited at different temperatures possess saturated hysteresis loops.The remanent polarization of the BFO film prepared at 640 ℃ is 65 μC/cm2,which is measured at the electric field of 800 kV/cm.The leakage conduction mechanism of BFO film was investigated,and it was found that the Poole-Frenkel emission is dominant conduction mechanism.