中文摘要：

以细胞注射3自由度柔顺并联微动平台为研究对象,针对柔顺并联机构多响应设计存在不稳定的难题,通过建立以微动平台多方向的铰链柔度为响应变量的精密定位及运动模型,引入响应曲面方法来解决多响应问题,通过揭示柔性铰链各种设计因子对微动定位平台多响应柔度的影响规律,破解了微纳机构多响应设计的难题,最终得到满足多响应柔度约束下的最佳稳健优化设计方案。该方法为满足微纳柔顺机构高、精、尖的可靠性与精度方面严苛要求的优化设计提出了一种新的解决途径,最后通过实例验证了该方法的正确性和有效性。

英文摘要：

Using the cell injection 3-RRR compliant parallel micro motion platform as the research object, for compliant parallel mechanism multiple response design existing the unstable problem, on the basis of establishing precision positioning and the movement model with multiple directions hinge flexibility of the micro motion platform as response variables, then the Response Surface Methodology （RSM） was introduced to solve the problem of multiple response, through revealing the influence law of multiple response flexibility with flexure hinge various design factors on micro motion positioning platform cracked the multiple response design problem of Micro-nano mechanism, finally got the optimal robust optimization design plan under the restriction of multiple response flexibility. This method provided a new solution of optimization design to meet the high, refined, sharp reliability and precision of the stringent requirements of Micro-nano compliant mechanism. The correctness and validity of the method was verified with an example in the end.