中文摘要：

以细胞注射3自由度柔顺并联微动平台为研究对象,针对微纳机构多响应稳健优化设计中确定各响应权重缺乏理论依据,难以对各设计方案进行全面客观评判差异性的问题,通过建立微动平台多方向的铰链柔度运动模型,引入熵权理论和满意度函数方法来破解微纳柔顺机构多响应设计稳健性的难题,最终得到满足多响应柔度约束条件下的优化设计方案。实例表明该方法可以为满足微纳柔顺机构高、精、尖的可靠性与精度优化设计的严苛要求提供一种新的解决途径。

英文摘要：

Using the cell injection 3-RRR compliant parallel micro motion platform as the research object,it is difficult to conduct a comprehensive and objective evaluation of diversity issues,and lacks of theoretical basis as setting the weight of each response,through the establishment of micro-platform multi-directional hinge motion model compliance,and then the entropy theory and satisfaction function method was introduced to solve the problem of multiple response,finally getting the optimal robust optimization design plan under the restriction of multiple response flexibility. Examples show that the method can meet the high micro-nano compliant mechanism, precision and reliability and precision optimization stringent requirements designed to explore a new solution.