中文摘要：

通过线电极叠加轴向微振动促进加工间隙中的电解产物排除,改善线电极电解线切割的稳定性,提高加工效率。自行研制线电极微幅振动电解加工系统,阐述线电极微幅振动电解加工原理,建立加工间隙产物排除的数学模型,揭示线电极叠加轴向微幅振动是排除电解产物、更新电解液的有效途径之一,分析线电极叠加轴向微幅振动对加工稳定性、加工效率和加工精度的影响。针对线电极叠加轴向微幅振动和不叠加振动两种情况进行了对比试验,试验结果表明,振幅8μm、频率10Hz的振动参数有利于改善线电极电解线切割稳定性,提高加工效率。与不叠加振动相比,线电极叠加轴向微幅振动情况下,线电极电解线切割可以在较小的电压、脉冲宽度和较大的脉冲周期下稳定进行,有效地缩小切缝宽度,提高了加工精度。采用优化后的振动参数和加工参数,在不锈钢工件（0Cr18Ni9）上加工出12μm的微缝以及形状复杂的微渐开线齿轮和微螺旋结构。

英文摘要：

The micro-tool vibration can be used to improve processing stability and processing efficiency of micro wire electrochemical machining by removing electrolytic products in machining gap.A wire electrochemical micro-machining system with micro-tool vibration unit is developed,which is successful to meet the micro-machining requirements.The principle of micro wire electrochemical machining with micro-tool vibration is explained.A mathematical model of electrolytic products removing is presented.Micro-tool vibration is adopted as an effective way to remove electrolytic products and renew electrolyte in machining gap.Influence of micro-tool vibration on machining stability,feed rate and processing parameters is investigated.For the cases of wire electrode with and without the tool vibration system,comparison experiments are carried out.Results show that the vibration of 8 μm amplitude and 10 Hz frequency can be recommended for micro wire electrochemical machining,which provides better processing stability and processing efficiency.In contrast to wire electrode without the vibration,the parameters of applied voltage,pulse on-time and pulse period are optimized and machining accuracy is improved with the micro-tool vibration.With the optimal micro-tool vibration and processing parameters,a micro slit of 12 μm wide and complex-shaped micro involute gear and micro helix structure are fabricated on 0Cr18Ni9 stainless-steel.