中文摘要：

微细球状电极在精微加工、测量领域有很大的应用空间,为制备低成本、高精度微细球状电极,提出新的制备工艺,在微细电解加工机床上运用微细电化学刻蚀（Micro electro-chemical machining,micro-ECM）—单脉冲放电加工（One pulse electro discharge,OPEG）组合技术制备微细球状电极,即先利用电化学刻蚀技术制备出微细圆柱状电极,然后利用单脉冲放电加工技术制备出前端的微球头。通过电极制备试验,研究各主要加工参数,如加工极性、加工电压、放电持续时间及峰值电流等对微细球状电极成形的影响,得出微细球状电极瞬时成形的基本规律。通过此方法成功地在电化学刻蚀出的直径15μm左右钨丝端部瞬间得到直径30μm左右微细球状电极。相对于线电极放电磨削技术（Wire electrode discharge grinding technology,WEDG）-OPEG组合技术,此方法更易于形成微细球状电极,加工成本低且表面质量好。

英文摘要：

Micro-spherical electrode can be widely used in micro machining and measuring filed.To form micro-spherical electrode with high precision and low cost,a new method is presented.Micro-spherical electrode can be fabricated by micro electro-chemical machining（micro-ECM） combined with one pulse electro discharge（OPEG） technology in the electrolysis machine tool.Cylindrical electrode is formed by micro-ECM first,then micro-spherical electrode is fabricated by OPEG technology.The key factors,such as the working polarity,the working voltage,the electric discharge duration,the peak current and so on,which impact the fabrication of the micro-spherical electrode are studied.The results show that a burnished micro-spherical electrode with diameter of about 30 μm can be formed instantaneously based on the micro-cylindrical electrode with about 15 μm diameter.Compared to wire electrode discharge grinding technology（WEDG） combined with OPEG technology,the presented method can form spherical electrodes with better surface quality at lower cost.