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中文摘要：
采用Ni-Nb薄膜作为导电阻挡层，以‰．5Sr0.5C003（LSCO）为底电极，构建了LSCO／Pb（zr0．4，Ti0.6）03（PZT）／LSCO异质结电容器。使用X射线衍射仪和铁电测试仪对其进行结构表征和性能测试。实验发现：Ni-Nb薄膜为非晶结构，PZT薄膜结晶状况良好。LSC0／PZT／LSCO电容器在5V外加电压测试下，电滞回线具有良好的饱和趋势，剩余极化强度P，为35．5μC／cm2，矫顽电压K为1．42V，电容器具有良好的抗疲劳特性和保持特性。
英文摘要：
The Ni-Nb film was used as a conductive barrier layer to integrate Lao. 5Sr0.5 CoO3 （LSCO）/Pb （ Zro.4, Ti06 ） 03 （ PZT）/La0.5Sr0.5CoO3 （LSCO） heterostructure capacitor on Si substrates. The structural and physical properties of the capacitor were inves -ray diffraction results showed that the Ni-Nb film condition. It is found that the LSCO/PZT/LSCO tigated by X-ray diffraction and a ferroelectric tester. X is amorphous, and the PZT film is crystalline in good capacitor presented a saturated hysteresis loop at 5 V applied voltage ferroelectric property measurement. The remnant polarization and coercive voltage of the LSCO/PZT/LSCO capacitor are 35.5 μC/cm2 and 1.42 V, respectively. Moreover, it is found that the capacitor possessed good fatigue and retention characteristics.
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