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Characterization of Hafnium-Zirconium-Oxide-Nitride films grown by ion beam assisted deposition
  • ISSN号：0042-207X
  • 期刊名称：Vacuum
  • 时间：0
  • 页码：1078-1082
  • 相关项目：双频调制等离子体和双离子束制备复合铪基高k薄膜机理及物理特性
作者： Jin, C.G.|Yu, T.|Bo, Y.|Zhao, Y.|Zhang, H.Y.|Dong, Y.J.|Wu, X.M.|Zhuge, L.J.|Ge, S.B.|
同期刊论文项目
双频调制等离子体和双离子束制备复合铪基高k薄膜机理及物理特性
期刊论文 15 会议论文 2 著作 2
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