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Effect of Ta incorporation on the microstructure, electrical and optical properties of Hf1xTaxO
  • ISSN号：0042-207X
  • 期刊名称：Vacuum
  • 时间：0
  • 页码：58-64
  • 相关项目：双频调制等离子体和双离子束制备复合铪基高k薄膜机理及物理特性
作者： T. Yu,C.G. Jin, H.Y. Zhang, L.J. Zhuge,X.M.Wu|
同期刊论文项目
双频调制等离子体和双离子束制备复合铪基高k薄膜机理及物理特性
期刊论文 15 会议论文 2 著作 2
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