中文摘要：

采用两次阳极氧化法制备了孔洞排列有序的多孔氧化铝基底,并在其上用磁控溅射法制备了SmTbCo垂直磁化膜.振动样品磁强计（VSM）测试结果显示,加入阳极氧化铝底层后可以将SmTbCo薄膜的矫顽力从370kA/m提高到530kA/m,并且随着氧化铝底层孔洞直径的减小,上层SmTbCo磁性薄膜的矫顽力与剩磁矩形比随之增大.由薄膜断面的扫描电镜（SEM）照片可以看出,阳极氧化铝底层由于其自组织效应所形成规则密集的六角边形多孔结构能够明显促使上层的SmTbCo磁性薄膜生成柱状结构.这一柱状结构提高了薄膜的矫顽力,从而拓宽了SmTbCo薄膜材料在超高密度垂直磁记录中的应用.

英文摘要：

A self-ordered hexagonal array of nanopore was fabricated by anodizing a thin film of A1 on glass and subsequently SmTbCo perpendicular thin film was prepared on the AAO underlayer by magnetron sputtering. The vibrating sample magnetometer （VSM） measurement reveals that introducing anodized aluminum oxide （AAO） undedayer can increase the coercivity of SmTbCo thin film from 370kA/m to 530kA/m. With the decrease of hole diameter of AAO underlayer, the coercivity and remanence squareness ratio of SmTbCo magnetic thin film are increased. SEM observations indicate that the SmTbCo thin film deposited on the AAO underlayer consists of a column structure which is attributed to the AAO underlayer self-ordered hexagonal array of nanopore structure, The enhancement of coercivity caused by heterogeneous structure extends SmTbCo thin film＇ s application in super high density perpendicular magnetic recording.