为改善镁合金表面的耐磨性能,采用磁控溅射工艺在AZ31镁合金表面制备了纳米Al203陶瓷涂层。用XRD、SEM-EDS等分析了涂层的结构和形貌,用正交试验讨论了温度、功率、时间对涂层表面硬度的影响规律。结果表明,影响纳米Al2O3膜硬度和耐磨性的因素是溅射功率和溅射时间,最佳的工艺为80℃,200W,3h。采用本工艺技术,材料表面主要为2~10um厚、30nm左右的粒状δ-Al2O3致密层,表层硬度从基体767MPa提高为1 360MPa,提高了77.31%。
In order to improve the wear-resisting property of magnesium alloy’s surface coating,Al2O3 nano-ceramic coating on the surface of AZ31 magnesium alloy is prepared using the magnetron sputtering process.Influences of temperature,power and time on hardness of surface layer are discussed by orthogonal method.Morphology,phases and composition of coatings are analyzed by SEM,XRD and EDS.The results show that the time and power are important factors to affect hardness and wear resistance.The process parameters of 80 ℃,200 W and 3 h are the optimal sputtering process.Through this process,the thickness of nano-Al2O3 coating on AZ31 is about 2 to 10 μm and the grain size is about 30 nm.The surface hardness of ceramic coating reaches up to 1 360 MPa,and increases more than 77.31% of the substrate hardness of nano-Al2O3 coating.