为了校正利用计算全息图(CGH)补偿检测离轴非球面引入的二维投影畸变,提出了基于检测光路仿射变换的投影畸变校正方法。通过追迹检测光路求解畸变映射函数,借助镜面特征点实现畸变校正结果与镜面的高精度对准,利用校验特征点实现校正误差检验。将该技术实际应用于某项目800mm×600mm离轴非球面主镜检测和加工,检测结果与工件面形位置误差由校正前80mm降低至1mm以下。根据畸变校正后的数据,对该镜采用离子束抛光,最终面形精度[用均方根(RMS)误差表示]达到0.0162A(A=0.6328μm)。
In order to correct the distortion introduced in the null testing with computer generated hologram (CGH) for off-axis aspheric, a mapping distortion method is proposed based on affine transformation of the test ray. The distortion mapping function is solved by ray tracing. The high alignment accuracy between the calibration result and the mirror surface is realized with feature points on the mirror, and calibration points are utilized to test the correction error. An off-axis asphere with size of 800 mm X 600 mm is tested. After mapping distortion correction, the position error between the test result and the prototype's profile is reduced from 80 mm to less than 1 ram. The corrected output is applied to polish the mirror by ion beam and its accuracy [-represented by root-mean-square (RMS) error] is 0.0162A(A=0.6328μm).