自由曲面能有效地简化光学系统结构并提高其性能,在照明光学系统和成像光学系统中均具有良好的应用前景。为了实现自由曲面的高精度光学检测,分析了自由曲面的计算机全息图(CGH)检测方法并讨论了它的限制因素;探讨了使用基准CGH区域解决自由曲面检测时的对准问题;设计并制作了直径为180 mm的CGH对某三次方项波前编码自由曲面(口径150 mm,PV为6λ,λ@632.8 nm)进行了光学检测,该方法的检测结果(0.068λrms)与非零位检测方法的检测结果(0.067λrms)一致,实验验证了自由曲面的CGH检测方法。该方法具有易对准、精度高和效率高的优点。
Freeform surface is preferred in both illumination optical systems and imaging optical system,which effectively simplifies the optical system configuration and enhances its performance.In order to test freeform precisely,computer-generated hologram(CGH) testing method was discussed in this paper,including its design method and restriction factor.The alignment procedure with fiducial CGH sections was also investigated to guide the alignment of freeform.A CGH with diameter of 180 mm was designed and fabricated to test a cubic wavefront-coding freeform(with diameter of 150 mm,and a 6 λ cubic terms deviation from plane,λ@632.8 nm).The testing result(0.068 λ rms) agrees well with the non-null testing result(0.067 λ rms).The method described in this paper is easy to align,with both excellent precision and good efficiency.