中文摘要：

提出了一种新型微型杆式超声电机，并对该杆式电机的驱动机理进行了仿真。该电机采用两段金属柱体压紧5片压电陶瓷片作为定子。该定子结构和压电陶瓷片的布局方式可以提高其机电转换效率。为尽量减小定、转子之间的径向滑移以提高摩擦传动效率，电机采用了柔性转子，对原理样机及其微型驱动器进行了性能实验。电机的外径为9mm。长度为15mm，重3．2g。当电机工作在杆式定子的一阶弯曲频率（72kHz）附近时，电机实测最大转速为520r／min，最大输出力矩为4．5mN·m。实验结果表明，该电机具有良好的稳定性。利用频率自动跟踪技术对电机转速进行闭环控制，可以将其转速波动稳定在3％之内。

英文摘要：

A new rod-shaped traveling wave ultrasonic micromotor is developed. In the micromotor, five pieces of piezoelectric ceramics clamped by two metal cylinders are used as its stator. The driving principle of the rodshaped ultrasonic motor is simulated. The stator structure and the position to lay these piezoelectric ceramics are calculated to improve the electro mechanical conversion efficiency. A flexible rotor is designed to reduce the radial slip between the stator and the rotor, and to improve the motor efficiency. The prototype motor and its micror driver are tested. The motor is 9 mm in out-diameter, 15 mm in length and 3.2 g in weight. When the motor operates with the first bending frequency （72 kHz） of the stator, its maximal rotational speed and the torque reach 520 r/rain and 4.5 mN · m. Results show that the motor has good stability. The speed fluctuation is controlled within 3% by the frequency automatic tracking technique.