中文摘要：

对压电陶瓷片的布局方式与力系数之间的关系进行了分析,证明了压电陶瓷片粘贴在金属弹性体一阶弯振的波谷位置时其激振效率是最高的.研制了一种新型定子结构的微型柱体超声电机.该电机直径5mm,长30mm,重量4.2g.当驱动电压峰峰值为200V,驱动频率为53kHz时,电机最大转速为350r/min,堵转力矩为2.5×10^-3N.m.因为这种电机结构比较简单紧凑,便于实现进一步的微型化.所以又利用压电陶瓷管为激励元件,研制出直径2mm,长度7mm,重量为0.258g的微型柱体超声电机.在驱动电压峰峰值为60V,驱动频率75kHz时电机的转速为813r/min.文中详细介绍了这2个微型电机的工作原理、结构特点和设计方法.

英文摘要：

The relation between the configuration and the force coefficient of ceramics is analyzed. The maximum excitation efficiency will be obtained when the ceramics are placed at the trough of the first bending mode of the stator. A cylindrical ultrasonic micromotor with novel stator is proposed based on the conclusion. The prototype motor is 5mm in diameter, 30mm in length and its weight is 4.2g. The micromotor operates with the first bending mode at 53kHz. Its maximum speed is 350r/min when the peak value of drive voltage is 200V and the stall torque reaches 2.5×10^-3N.m. This motor is suitable for miniaturization because of its simple structure. So another cylindrical ultrasonic micromotor is manufactured. Piezoelectric ceramic tube is used as its stator. This micromtor is 2mm in diameter, 7mm in length and its weight is 0.258g. Its speed reaches 813r/min when the peak value of drive voltage is 60V at 75 kHz. The operation mechanism, structure and design method of these 2 motors are introduced.