中文摘要：

螺旋波放电具有很高的耦合效率，作为一种高密度等离子体源在材料表面处理、薄膜沉积、离子推进器等领域具有广阔的应用前景.不同的波模式下能量耦合的方式直接关系到源区的等离子体分布，进而影响扩散腔中材料的处理和沉积薄膜的均匀性.本文通过电特性（功率-电流）曲线、增强型电荷耦合相机和磁探针诊断等方式对螺旋波等离子体源中出现的角向不均匀性进行研究，认为天线下端出现的驻波螺旋波可能是造成这种现象的关键因素.

英文摘要：

Helicon wave discharge has higher coupling efficiency than capactively coupled and inductively coupled discharge in low static magnetic field. In the wave sustained mode, a large volume and large area plasma can be produced at lower pressure by using comparable discharge power, and thus it expands the helicon wave plasma applications in material surface modification, thin film deposition, dry etching and thruster usage. However, the application of helicon wave source still faces challenges, such as the controversial power coupling mechanism, operation stability and the plasma distribution uniformity in the experiment. The wave mode existing in bounded helicon wave plasma column generally consists of helicon and Trivelpiece-Gould （TG） components, and their mode transitions and different transverse wave field distribution regions, and the propagating characteristic of the helicon wave are directly related to the power coupling and plasma density distribution in the source region, then affect the uniformity of material processing and film deposition in the diffusion chamber. In this paper, the plasma azimuthal non-uniformity, with using Doubble Saddle antenna, 100 G static magnetic field in helicon wave plasma source, is studied by electrical characteristic （power-current） curve, intensified charge coupled device （ICCD） image and magnetic probe measurements. The electrical characteristic curve indicates two discharge stages with different effective resistances. Meanwhile, in the second stage, the higher effective resistance would result in higher coupling efficiency and higher plasma density. But the ICCD image demonstrates the azimuthal non-uniformity of plasma, indicating that the main heating points at the diagonal edge are linked to the stationary transverse electrical field line pattern of azimuthal mode number m=＋1 helicon wave, and the magnetic probe is used to measure the helicon wave magnetic field Bz component along the quartz source tube axially. The magnetic probe results show that the stan