中文摘要：

采用中频孪生靶反应磁控溅射在金属镍基底上制备氮化铬薄膜。利用X射线衍射仪、显微硬度计、扫描电子显微镜、原子力显微镜、磨擦磨损试验仪和电化学工作站等系统研究了氮气流量（即氮/氩流量比）对薄膜的相结构、显微硬度、表面形貌、附着力、耐磨性和耐腐蚀性的影响。结果得到随氮/氩流量比的增加,CrNx薄膜成分经历了一个由Cr→Cr＋Cr N→Cr＋Cr2N＋Cr N的演化过程,薄膜形貌由致密、球状颗粒向类长方体规则形状的面心结构转化;而薄膜的表面粗糙度则呈现出在低氮时稍微下降,高氮含量时又快速增加的趋势,在N2/Ar流量比为23/53时,粗糙度达到最小;耐磨性、硬度都呈现随着氮流量的增加先上升后下降;薄膜耐腐蚀性能随氮的加入明显得到改善。综合性能分析认为,制备2.5μm厚的氮化铬薄膜时在N2/Ar（流量比）为23/53较为合适。

英文摘要：

The chromium nitride （CrNx） coatings were deposited by mid-frequency dual-target reactive mag- netron sputtering on Ni-substrate. The influence of the ratio of NE/Ar flow-rates on the microstructures, phase-struc- tures, mechanical behavior and interfacial properties was investigated by X-ray diffraction, scanning electron micros- copy, atomic force microscopy, electrochemical workstation and conventional mechanical probes. The results show that the N2/Ar flow-rate ratio significantly affected the microstructures, phase-structures and tribological properties. For example, as the N2/Ar ratio increased, the Cr-phase transitions, Cr→Cr ＋ CrN→Cr ＋ Cr2 N ＋ CrN, occurred, ac- companied by an increase of the surface roughness because the spherical grains rapidly turned into rectangular-like fcc-phased grains ,with the surface roughness minimized at N2/Ar = 23/53. As the N2 flow-rate increased, the surface micro-hardness and wearesistance changed in an increase-decrease mode, and the corrosion-resistance sharply increased. At N2/Ar =23/53 ,high quality chromium nitride coatings,2.5 μm thick,were synthesized.