中文摘要：

为研究放电参数对射频介质阻挡放电的放电模式和斑图特性的影响,通过分析活性粒子在放电中所发挥的作用来探究放电机制的差异,采用一个表面覆盖有石英介质的铜电极和一个自制水电极的放电系统,在大气压氦气/氮气混合气体和氩气/氮气混合气体射频介质阻挡放电中获得了六边形斑图,并研究了电源功率、氮气流量对斑图特性的影响。通过比较两种放电形成的斑图发现：氦气/氮气混合气体中形成六边形斑图所需电源功率更高且具有更强的辉光背景。利用发射光谱诊断技术揭示了放电形成的活性粒子,分析认为亚稳态粒子通过Penning电离或Penning激发在放电中发挥了关键性作用。这不仅有助于深入理解射频介质阻挡放电的物理机制,还对斑图动力学的研究有参考价值。

英文摘要：

The influences of discharge parameter on discharge mode, pattern structure, and discharge mechanism were investigated by analyzing the role of reactive species in discharge process. Hexagon pattern was obtained in atmospheric helium/nitrogen mixture and atmospheric argon/nitrogen mixture by using an RF-DBD system, which consists of a po- wered brass electrode covered by fused-silica as a dielectric layer and a grounded liquid electrode. Moreover, the influences of discharge power and flow rate of nitrogen on pattern formation were investigated. Comparison between the two types of discharge reveals that the discharge power and background intensity of hexagon pattern in helium/nitrogen mixture are obviously increased. The reactive species generated in discharges are revealed by optical emission spectros- copy （OES）. Penning ionization or Penning excitation by metastable atoms plays a dominant role in pattern structure, contributing not only to the thorough understanding of discharge mechanism but also to the study of pattern dynamics.