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Surface engineering of synthetic nanopores by atomic layer deposition and their applications
  • ISSN号:2095-025X
  • 期刊名称:《材料科学前沿:英文版》
  • 时间:0
  • 分类:O242.23[理学—计算数学;理学—数学] TN305[电子电信—物理电子学]
  • 作者机构:[1]State Key Laboratory of Nuclear Physics and Technology, Peking University, Beijing 100871, China, [2]Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600, China
  • 相关基金:This work was financially supported by the Ministry of Science and Technology of China (Grant No. 2010CB832904), NSAF (Grant No. U1230111), and the National Natural Science Foundation of China (NSFC; Grant Nos. 91226202, 11175024 and 11375031).
中文摘要:

在过去的十年, nanopores 为各种各样的潜在的应用程序广泛地被开发了,并且他们的性能极大地取决于 nanopores 的表面性质。原子层免职(ALD ) 是为扔薄电影的一种新技术,它很快从一种壁龛技术被开发了到一个确定的方法。ALD 电影能保角地甚至在 nanoscale 在限制区域盖住表面,因此,是一个强大的工具修改合成 nanopores 并且也的表面制作复杂 nanopores 被证明。这评论在 nanopore 合成和 ALD 基本知识上给简短介绍,然后集中于由 ALD 和他们的应用程序处理的合成 nanopores 的各种各样的方面,包括单个分子的察觉到, nanofluidic 设备, nanostructure 制造和另外的应用程序。

英文摘要:

In the past decade, nanopores have been developed extensively for various potential applications, and their performance greatly depends on the surface properties of the nanopores. Atomic layer deposition (ALD) is a new technology for depositing thin films, which has been rapidly developed from a niche technology to an established method. ALD films can cover the surface in confined regions even in nanoscale conformally, thus it is proved to be a powerful tool to modify the surface of the synthetic nanopores and also to fabricate complex nanopores. This review gives a brief introduction on nanopore synthesis and ALD fundamental knowledge, and then focuses on the various aspects of synthetic nanopores processing by ALD and their applications, including single-molecule sensing, nanofiuidic devices, nanostructure fabrication and other applications.

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期刊信息
  • 《材料科学前沿:英文版》
  • 主管单位:中华人民共和国教育部
  • 主办单位:高等教育出版社
  • 主编:
  • 地址:北京市朝阳区惠新东街4号富盛大厦15层
  • 邮编:100029
  • 邮箱:
  • 电话:010-58556485
  • 国际标准刊号:ISSN:2095-025X
  • 国内统一刊号:ISSN:11-5985/TB
  • 邮发代号:80-974
  • 获奖情况:
  • 国内外数据库收录:
  • 俄罗斯文摘杂志,荷兰文摘与引文数据库,美国科学引文索引(扩展库)
  • 被引量:7