在过去的十年, nanopores 为各种各样的潜在的应用程序广泛地被开发了,并且他们的性能极大地取决于 nanopores 的表面性质。原子层免职(ALD ) 是为扔薄电影的一种新技术,它很快从一种壁龛技术被开发了到一个确定的方法。ALD 电影能保角地甚至在 nanoscale 在限制区域盖住表面,因此,是一个强大的工具修改合成 nanopores 并且也的表面制作复杂 nanopores 被证明。这评论在 nanopore 合成和 ALD 基本知识上给简短介绍,然后集中于由 ALD 和他们的应用程序处理的合成 nanopores 的各种各样的方面,包括单个分子的察觉到, nanofluidic 设备, nanostructure 制造和另外的应用程序。
In the past decade, nanopores have been developed extensively for various potential applications, and their performance greatly depends on the surface properties of the nanopores. Atomic layer deposition (ALD) is a new technology for depositing thin films, which has been rapidly developed from a niche technology to an established method. ALD films can cover the surface in confined regions even in nanoscale conformally, thus it is proved to be a powerful tool to modify the surface of the synthetic nanopores and also to fabricate complex nanopores. This review gives a brief introduction on nanopore synthesis and ALD fundamental knowledge, and then focuses on the various aspects of synthetic nanopores processing by ALD and their applications, including single-molecule sensing, nanofiuidic devices, nanostructure fabrication and other applications.