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Effects of hydrogen flux on the properties of Al-doped ZnO films sputtered in Ar+H-2 ambient at low
  • ISSN号：0169-4332
  • 期刊名称：Applied Surface Science
  • 时间：0
  • 页码：2999-3003
  • 语言：英文
  • 相关项目：稳定高效的ZnOp型掺杂与生长设备、可控技术及测试方法研究
作者： Y. Cheng|Y. B. Xu|Y. C. Chang|Y. F. Sun|W. F. Liu|G. T. Du|T. P. Yang|J. M. Bian|
同期刊论文项目
稳定高效的ZnOp型掺杂与生长设备、可控技术及测试方法研究
期刊论文 63 专利 8
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