针对Ge—Sb—Se硫系玻璃光学非均匀性(内部条纹、裂纹、气泡、均匀性等)检测与表征的困难,提出了一种利用样品的近红外透射图像、及中红外线扩散函数和调制传递函数(MTF)并举表征其光学非均匀性的新方法,并建立了相应的检测装置。在此基础上,对自制的Ge28Sb12Se60(mol%)硫系玻璃样品进行了内部缺陷和光学均匀性测试,并比较分析了样品平面度与平行度对实验结果的影响。结果表明,近红外透射成像能清晰地检测到样品内部的条纹分布和缺陷;中红外线扩散函数和MTF可半定量地表征样品的光学非均匀特性;当表面光圈小于1时,均匀Ge—Sb—Se硫系玻璃样片的线扩散函数呈高斯分布,MTF实验值与理论值相近且平均值相差小于10%。
Aiming at the difficulties of charactering the optical inhomogeneity of opaque Ge-Sb-Se chalcogenide glasses(internal stripes, cracks, bubbles, uniformity, etc.), a new method was proposed which used the transmission image, line spread function and modulation transfer function (MTF), and the corresponding detection device was also established. On this basis, we studied the internal defects and optical inhomogeneity of the self-made Ge28Sb12Se60 (mol%) chalcogenide glass and analyzed the influence of sample flatness and parallelism influence on the test results. The results show the near infrared imaging can clearly detect the stripes distribution and defects in the sample, the line spread function and MTF can characterize the inhomogeneity features semi-quantitatively. The experimental and theoretical average ofMTF is with a difference of less than 10% when the surface aperature of samples is less than 1.