中文摘要：

应用非晶的Ti-Al薄膜作为导电阻挡层，通过溶胶-凝胶法和磁控溅射法成功地在Si基片上制备了La0.5Sr0.5CoO3/Pb（Nb0.02Zr0.39Ti0.59）O3/La0.5Sr0.5CoO 3（LSCO/PNZT/LSCO）电容器异质结，研究了该异质结的铁电性能。当外加电压为5V时，LSCO／PNZT／LSCO铁电电容器的剩余极化强度为～18．0μC/m^2，矫顽电压为～0．7V，该电容器具有较好的保持持性和抗疲劳特性。

英文摘要：

La0.5Sr0.5CoO3/Pb（Nb0.02Zr0.39Ti0.59）O3/La0.5Sr0.5CoO 3（LSCO/PNZT/LSCO） ferroelectric capacitor heterostructure is fabricated on Si substrate with amorphous Ti-Al film as the diffusion barrier layer,in which both LSCO and Ti-Al films are grown by magnetron sputtering, and PNZT is prepared by sol-gel. We found that the LSCO/PNZT/LSCO capacitor,measured at 5 V, possesses very good ferroelectric properties, such as small coercive voltage（ -0.7 V）, high remnant polarization（ - 18.0 μC/cm^2）, good fatigue-free and retention characteristics.