中文摘要：

在外延SrTiO3（STO）作为缓冲层的Si基片上，应用溶胶-凝胶法（sol-gel）和磁控溅射法，在5．50℃温度下制备了外延的La0.5Sr0.5CdO3／Pb（Zr0．2Ti0．8）O3/La0．5Sr0．5CoO3（LSCO／PZT／LSCO）异质结。X射线衍射结果表明，LSCO／PZT／LSCO异质结是c向外延生长的。当外加电压为60V时，LSCO／PZT／LSCO铁电电容器的剩余极化强度为．50．3μC/cm^2.，当电压为30V时，铁电电容器有效极化强度为80μC/cm^2.。其它电学性能表明。PZT铁电电容器具有较高的电阻率和脉冲宽度对极化强度的影响较弱。

英文摘要：

Sol-Gel La-Sr-Co-O/Pb（Zr0.2Ti0.8）O3/La-Sr-Co-O（LSCO/PZT/LSCO） heterogeneous films have been successfully grown by a combination of sol-gel and magnetron sputtering at 550℃ on Si （111 ） substrate coated with an SrTiO3 （STO） buffer layer. The hereto-junctions of the films were fabricated.X-ray diffraction （XRD） study of its microstructures shows that the highly preferred growth orientation of the polycrystalline films is c-axis. Biased at 60 V, the remnant polarization of the LSCO/PZT/LSCO ferroelectric capacitor is 50.3μC/cm^2. ; whereas at 30V, its effective polarization is 80μC/cm^2. Moreover, the capacitor shows several strengths, including fairly high resistivity and weak influence of pulse width on polarization.