文章介绍了铁电薄膜光波导的特点和表征方法,综述了铁电薄膜材料与制备方法,探讨了铁电薄膜光波导的发展趋势。
Research progress of ferroelectric film optical waveguide is summarized based on the characteristics and characterization of ferroelectric waveguide, ferroelectric film materials, and deposition methods. Some aspects for future ferroelectric waveguide device have been proposed.