在简要介绍纳米TiO2功能薄膜各种制备技术的基础上,着重对近年来研究TiO2薄膜及其复合薄膜采用的微区分析技术及应用研究进展进行了综述,并比较了各种微区分析技术的优缺点。
In this review, the various methods for preparation of nanometer TiO2 functional thin film are introduced firstly. Then the progress in research on micro-area analysis techniques and their applications in recent years for titanium dioxide thin film and its composite thin film are reviewed with great emphasis. Meanwhile, the advantages and weak points of different micro-area analysis techniques are compared and discussed.