中文摘要：

在室温条件下,采用磁控溅射方法在蓝宝石(0001)衬底上制备了外延的ZnO薄膜。采用原子力显微镜(AFM)、X射线衍射仪(XRD)、可见-紫外分光光度计系统研究了ZnO薄膜微观结构和光学特性。AFM测量结果表明ZnO薄膜具有较为均匀的ZnO晶粒,表面平整,具有较小的均方根粗糙度(0.9 nm);X射线衍射结果表明制备的ZnO薄膜为具有六角纤锌矿结构的外延薄膜;光学透射谱显示样品在可见光范围内具有较高的透过性,并在370 nm附近出现一个较陡的吸收边,表明在室温下制备出了具有较高质量的ZnO薄膜。

英文摘要：

Epitaxial ZnO thin film has been fabricated on sapphire substrate(0001) using RF magnetron sputtering at room temperature.The microstructural and optical properties of ZnO film were investigated by atomic force microscope(AFM),X-ray diffraction(XRD),Vis-UV spectrophotometer at room temperature.The AFM measurement shows that the uniform grain sized ZnO film is very smooth with root mean square roughness of 0.9 nm.XRD results indicate that the ZnO film grown on sapphire is epitaxial with wurtzite structure.Ro...