为了提高静电放电特别是空气式静电放电试验结果的重复性,从理论和试验两方面对影响空气式静电放电(ESD)特性的相关因素进行了研究,结果表明:电弧长度是影响空气式ESD特性的一个最直接因素,不同电弧长度会得到差别很大的空气式ESD事件,相同放电条件下,电弧长度越短,峰值电流越大,上升时间越小;其它条件一定的情况下,电极的接近速度会影响到电弧长度而引入时间相关效应,进而影响空气式ESD特性,比如当放电电压一定时,接近速度越快,峰值电流越大,上升时间越小;不同的放电电极极性将产生空间极性效应或空间电荷效应,从而影响空气式ESD特性;不同的环境条件尤其是空气成分与空气湿度对空气式ESD的影响很大。这些研究成果将为空气式ESD的试验规律研究提供理论依据。
In order to improve the repeatability of electrostatic discharge(ESD),the factors that affect the characteristics of air discharge were studied.Results show that the arc length is the most immediate factor,different arc length could cause different air discharge events;under the same discharge condition,the shorter the arc length is,the larger the peak current and the shorter the rise time will be;when other experimental conditions are constant,the electrode approaching speed will affect the arc length,and then affect the characteristics of air discharge,e.g.,when the discharge voltage is constant,the faster the approaching speed is,the larger the peak current and the shorter the rise time will be;different discharge polarity will cause space polarity effect or space charge effect,and the characteristics of air discharge are affected;different environment conditions especially the air component and humidity will greatly affect the characteristics of air discharge.Those results can provide a certain theoretical base for studying the experimental rules of air discharge.