中文摘要：

有二个稳定的位置的电磁的 microactuator 被介绍。致动器与二免费结束，有二固定结束的一根扭力的横梁，平面卷和永久磁铁由一根伸臂横梁组成。伸臂横梁由于永久磁铁的使用有二个稳定的位置。与从平面卷产生的电磁的使活动，伸臂横梁将从一个稳定的位置切换到其它。机械、磁性的分析在致动器上被执行，并且有 2.2 公里脳 2 .5 公里的一种尺寸的设备与 UV-LIGA 技术被制作。有 70 妈的一个振幅的当前的脉搏为致动器鈥檚 在二个稳定的状态之间切换被需要的测试结果表演，和切换的时间是仅仅 6 ms。伸臂的结束的排水量是大约 15 渭 m。关键词微机电的系统( MEMS )- microactuator -双稳态的电磁的使活动-中国(资助号码 10377009 )的国家自然科学 Foundatin 支持的 UV-LIGA 技术 Projece ，国家高科技研究和开发编程序(资助号码 863 - 2003AA404140 )，并且中国(资助号码 41308050116 )的国家信息工业部的科学基础

英文摘要：

An electromagnetic microactuator with two stable positions is presented. The actuator consists of a cantilever beam with two free ends, a torsional beam with two fixed ends, planar coils and permanent magnets. The cantilever beam has two stable positions due to the use of permanent magnets. With electromagnetic actuation arising from the planar coils, the cantilever beam will switch from one stable position to the other. Mechanical and magnetic analysis are carried out on the actuator, and the device with a size of 2.2 mm × 2.5 mm is fabricated with the UV-LIGA technology. The test results show that a current pulse with an amplitude of 70 mA is needed for actuator＇ s switching between the two stable states, and the switching time is no more than 6 ms. Displacement of the end of cantilever is about 15 μm.